Introductio laganum carrier
FRUCTUS CATAGORY
▶Wafer Carrier System in PECVD & TALOX Process
• PECVD & TALOX Graphite cymba (M4~M12)
• Vertical SM-Boat (M4, M6)
• Implant & imbri Graphite Part (M4~M6)
• C/C Tray & Ceramic Coating
• Metal RIE-Tray & Ceramic Coating
• Vacuum Sigillum : O-Ring & SQ-Ring
▶Texturing & Infectum Etching serie Processus
• LSC H-Carrier or cassette (M4~M12)
• LSC V-Carrier vel cassette (M4~M12)
• ASC Portitorem vel cassette (M4, M6)
• W/F Portitorem & Repono Box (M4~M12)
• Transport Rota (Rollerus) Series
▶Solaris Cell Carrier & Metal Carrier
• TRC Portitorem vel cassette (M4 ~ M12)
• Magazine (cum LORUM)
GRAPHITE NAVIS (H-Type)
19P6-216CT (WF M4~M12)
GRAPHITE NAVIS (H-Type)
21P6-240CT WF M4~M12)
GRAPHITE NAVIS (H-Type)
23P7-308CT(W/F M4~M12)
GRAPHITE NAVIS (H-Type)
22P/7-294TP (W/F M4~M12)
GRAPHITE NAVIS (H-Type)
W182-22P7-294CT (W/F M12)
W182-21P6-240CT (W/F M12)
WF FERCULUM & PRAECLUSIO BOX (~M12)
F / C FERCULUM vel FERCULUM (M4 ~ M10)
F / C FERCULUM vel FERCULUM (M4 ~ M10)
VERTIC NAVIS (SM) M6
LSC-H-FERTORIUS(~M12)
LSC-V-FERTORIUS(~M12)
ASC FERCULUM (~M6)
TRC FERCULUM (~ M12)
TRC FERCULUM (~ M12)
GRAPHITE-NAVIS(M12)
Wafer Carrier System in PECVD Process
GRAPHITE NAVIS (CT-Designed) M10/M12 Process
• SPECIALI DESIGN CONCEPTO
GRAPHITE NAVIS (CT-Designed) M4/M6 Process
NAVIS Accessorius Partes
VERTICAL NAVIS-161.7mm WAFER
VERTICALIS NAVIS 166mm WAFER
VERTICAL NAVIS-161.7mm, 166mm WAFER
Solaris Cell Carrier & Metallum TRC Carrier
EXEMPLUM: Automation
WAFER SIZE: 156×156MM 156.75×15.75MM
161.7x161.7MM 166x166MM
180× 180mm 210×210mm
CONSUETUDO: Fer (Cassette)
CAPAX: 100 sheet
PIX : 4.76MM/5.953mm/6.35mm
DIMENSIONE: Approx 559×220×220MM
Proxime 712×260×260MM
COMMODUM: Atmosphaera
MATERIA : FLAMMA, CIS BAR aluminium (anodizing)
POM (Antistatic)
Cover of bottom bar-EPDM/PU/VITON (ASE)
TRC-METAL FERCULUM (U'SER LINE)
TRC-METAL FERCULUM (U'SER LINE)
TRC-METAL FERCULUM (U'SER LINE)
SHOW & INSTITUO laminam, FERCULUM
